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Capacitively coupled distinct mechanical resonators for room temperature phonon-cavity electromechanics

Coupled electromechanical resonators that can be independently driven/detected and easily integrated with external circuits are essential for exploring mechanical modes based signal processing. Here, we present a room temperature phonon-cavity electromechanical system, consisting of two distinct resonators: a silicon nitride electromechanical drum capacitively coupled to an aluminum one. We demonstrate electromechanically induced transparency and amplification in a two-tone driving scheme and observe the phonon-cavity force affecting the mechanical damping rates of both movable objects. We also develop an analytical model based on linearly coupled motion equations, which captures the optomechanical features in the classical limit and enables to fit quantitatively our measurements. Our results open up new possibilities in the study of phonon-cavity based signal processing in the classical and potentially in the future in the quantum regimes.

preprint2022arXivOpen access
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