Abstract
A biased tunnel junction between a superconductor and a normal metal can cool the latter electrode. Based on a recently developed cooler with high power and superior performance, we have successfully integrated it with a dielectric silicon nitride membrane, and cooled phonons from 305 mK down to 200 mK. Without perforation and covered under a thin alumina layer, the membrane is rigorously transformed into a cooling platform that is robust and versatile for multiple practical purposes. We discuss our results and possibilities to further improve the device.
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