Abstract
A monolithic integrated tactile sensor array is presented, which is used to perform non-invasive blood pressure monitoring of a patient. The advantage of this device compared to a hand cuff based approach is the capability of recording continuous blood pressure data. The capacitive, membrane-based sensor device is fabricated in an industrial CMOS-technology combined with post-CMOS micromachining. The capacitance change is detected by a S?-modulator. The modulator is operated at a sampling rate of 128kS/s and achieves a resolution of 12bit with an external decimation filter and an OSR of 128.
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