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Toshiyuki Tabata
Researcher
PaperSolid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser AnnealingAuthorship / preprint / 2022PaperDopant redistribution and activation in Ga ion-implanted high Ge content SiGe by explosive crystallization during UV nanosecond pulsed laser annealingAuthorship / preprint / 2021PaperMicrosecond non-melt UV laser annealing for future 3D-stacked CMOSAuthorship / preprint / 2022PaperRecent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS DevicesAuthorship / preprint / 2022PaperFailure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin FilmsAuthorship / preprint / 2022