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Sebastien Halty
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Sebastien Halty3 visible / 3 total nodes / 2 links

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AuthorshipAuthorshipSebastien HaltyASebastien HaltyResearcherSolid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser AnnealingWSolid Phase Recrystalli...preprint / 2022Microsecond non-melt UV laser annealing for future 3D-stacked CMOSWMicrosecond non-melt UV...preprint / 2022
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Sebastien Halty

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PaperSolid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser AnnealingAuthorship / preprint / 2022PaperMicrosecond non-melt UV laser annealing for future 3D-stacked CMOSAuthorship / preprint / 2022

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