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Mika Pflüger
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Mika Pflüger3 visible / 3 total nodes / 2 links

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AuthorshipAuthorshipMika PflügerAMika PflügerResearcherExtracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXSWExtracting Dimensional ...preprint / 2020Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratingsWApplicability of the De...preprint / 2019
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Mika Pflüger

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PaperExtracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXSAuthorship / preprint / 2020PaperApplicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratingsAuthorship / preprint / 2019

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