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Marina Prenzel
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Marina Prenzel3 visible / 3 total nodes / 2 links

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AuthorshipAuthorshipMarina PrenzelAMarina PrenzelResearcherBimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputteringWBimodal substrate biasi...preprint / 2013Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitrideWTime resolved measureme...preprint / 2013
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Marina Prenzel

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PaperBimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputteringAuthorship / preprint / 2013PaperTime resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitrideAuthorship / preprint / 2013

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