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J. Upadhyay
Researcher
PaperSelf-bias Dependence on Process Parameters in Asymmetric Cylindrical Coaxial Capacitively Coupled PlasmaAuthorship / preprint / 2015PaperPlasma Processing of Large Curved Surfaces for SRF Cavity ModificationAuthorship / preprint / 2014PaperEtching Mechanism of Niobium in Coaxial Ar/Cl2 RF PlasmaAuthorship / preprint / 2014PaperReversal of the Asymmetry in a Cylindrical Coaxial Capacitively Coupled Ar/Cl2 PlasmaAuthorship / preprint / 2015PaperApparatus and method for plasma processing of SRF cavitiesAuthorship / preprint / 2015PaperCryogenic rf test of the first plasma etched SRF cavityAuthorship / preprint / 2016