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J. Benedikt
Researcher
PaperUnderstanding MicroplasmasAuthorship / preprint / 2011PaperThe role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressureAuthorship / preprint / 2011PaperSeparation of VUV/UV photons and reactive particles in the effluent of a He/O2 atmospheric pressure plasma jetAuthorship / preprint / 2011