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Haizheng Song
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Haizheng Song2 visible / 2 total nodes / 1 links

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AuthorshipHaizheng SongAHaizheng SongResearcherA comparative study of SiC epitaxial growth in vertical hotwall CVD reactor using silane and dichlorosilane precursor gasesWA comparative study of ...preprint / 2013
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Haizheng Song

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PaperA comparative study of SiC epitaxial growth in vertical hotwall CVD reactor using silane and dichlorosilane precursor gasesAuthorship / preprint / 2013

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