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E. Schuengel
Researcher
PaperCustomized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoringAuthorship / preprint / 2016PaperElectron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmasAuthorship / preprint / 2016PaperEffects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmasAuthorship / preprint / 2015PaperA computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmasAuthorship / preprint / 2016PaperThe effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive dischargesAuthorship / preprint / 2015PaperThe effect of ambipolar electric fields on the electron heating in capacitive RF plasmasAuthorship / preprint / 2016