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D. Ellerweg
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AuthorshipAuthorshipD. EllerwegAD. EllerwegResearcherThe role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressureWThe role of oxygen and ...preprint / 2011Understanding MicroplasmasWUnderstanding Microplasmaspreprint / 2011
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D. Ellerweg

Researcher