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C. Laubis
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C. Laubis3 visible / 3 total nodes / 2 links

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AuthorshipAuthorshipC. LaubisAC. LaubisResearcherMetrology of EUV Masks by EUV-Scatterometry and Finite Element AnalysisWMetrology of EUV Masks ...preprint / 2010Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical SimulationsWInvestigation of 3D Pat...preprint / 2011
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C. Laubis

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PaperMetrology of EUV Masks by EUV-Scatterometry and Finite Element AnalysisAuthorship / preprint / 2010PaperInvestigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical SimulationsAuthorship / preprint / 2011

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