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You-nian Wang

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physics.plasm-ph physics.comp-ph

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preprint2016arXiv

Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas

Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio-frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

preprint2010arXiv

Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry I: analysis of numerical techniques

We developed an implicit Particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry for the simulations of the radio-frequency discharges, by introducing several numerical schemes which include variable weights, multigrid field solver, etc. Compared to the standard explicit models, we found that the computational efficiency is significantly increased and the accuracy is still kept. Numerical schemes are discussed and benchmark results are shown. The code can be used to simulate practical reactors.

preprint2010arXiv

Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas

With an implicit Particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show sophisticating relations with the electrode areas. Two-dimensional kinetic effects are also illuminated. Compare to the fluid mode, PIC/MC model is numerical-diffusion-free and thus finer properties of the plasmas are simulated.