High Power Vacuum Ultraviolet Source Based on Gasdynamic ECR Plasma
We report experimental results of vacuum ultraviolet (VUV) emission from the plasma of an electron cyclotron resonance (ECR) discharge in hydrogen, sustained by powerful millimeter-wavelength radiation of a gyrotron. Distinctive features of the considered discharge are the high plasma density (1013 cm−3 order of magnitude) and, at the same time, the high electron average energy (10−300 eV), which makes it possible to significantly increase the efficiency of VUV re-emission of the energy deposited into the plasma by the microwave radiation. Experiments were performed with the plasma confined in a simple mirror trap and heated by pulsed gyrotron radiation 37.5 GHz / 100 kW under the ECR condition. The measured volumetric VUV emission power of Lyman-alpha line (122±10 nm) overlapping with the Werner band, Lyman band (160±10 nm), and molecular continuum (180±20 nm) reached 45, 25, and 55 W/cm3, respectively. The total absolute radiation power in these three ranges integrated over the plasma volume is estimated to be 22 kW i.e. 22% of the incident microwave power, which matches theoretical predictions. Further optimization of the conditions of the ECR hydrogen discharge sustained by powerful gyrotron radiation provides an opportunity for the development of effective technological VUV sources of a kilowatt power level.
