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Robert Franz

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physics.plasm-ph cond-mat.mtrl-sci

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preprint2016arXiv

Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Al $_{x}$ Cr $_{1-x}$ composite cathodes with Al contents of x = 0.75, 0.5 and 0.25 were exposed to cathodic arc plasmas in Ar, N $_2$ and O $_2$ atmospheres and their erosion behaviour was studied. Cross-sectional analysis of the elemental distribution of the near-surface zone in the cathodes by scanning electron microscopy revealed the formation of a modified layer for all cathodes and atmospheres. Due to intermixing of Al and Cr in the heat-affected zone, intermetallic Al-Cr phases formed as evidenced by X-ray diffraction analysis. Cathode poisoning effects in the reactive N $_2$ and O $_2$ atmospheres were non-uniform as a result of the applied magnetic field configuration. With the exception of oxide islands on Al-rich cathodes, reactive layers were absent in the circular erosion zone, while nitrides and oxides formed in the less eroded centre region of the cathodes.

preprint2015arXiv

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

The energy distribution functions of ions in the cathodic arc plasma using composite AlCr cathodes were measured as a function of the background gas pressure in the range 0.5 to 3.5 Pa for different cathode compositions and gas atmospheres. The most abundant aluminium ions were Al $^{+}$ regardless of the background gas species, whereas Cr $^{2+}$ ions were dominating in Ar and N $_2$ and Cr $^{+}$ in O $_2$ atmospheres. The energy distributions of the aluminium and chromium ions typically consisted of a high-energy fraction due to acceleration in the expanding plasma plume from the cathode spot and thermalised ions that were subjected to collisions in the plasma cloud. The fraction of the latter increased with increasing background gas pressure. Atomic nitrogen and oxygen ions showed similar energy distributions as the aluminium and chromium ions, whereas the argon and molecular nitrogen and oxygen ions were formed at greater distance from the cathode spot and thus less subject to accelerating gradients. In addition to the positively charged metal and gas ions, negatively charged oxygen and oxygen-containing ions were observed in O $_2$ atmosphere. The obtained results are intended to provide a comprehensive overview of the ion energies and charge states in the arc plasma of AlCr composite cathodes in different gas atmospheres as such plasmas are frequently used to deposit thin films and coatings.

preprint2015arXiv

Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO $_x$ film growth

The ion energies and fluxes in the high power impulse magnetron sputtering plasma from a Nb target were analysed angularly resolved along the tangential direction of the racetrack. A reactive oxygen-containing atmosphere was used as such discharge conditions are typically employed for the synthesis of thin films. Asymmetries in the flux distribution of the recorded ions as well as their energies and charge states were noticed when varying the angle between mass-energy analyser and target surface. More positively charged ions with higher count rates in the medium energy range of their distributions were detected in $+\mathbf{E}\times \mathbf{B}$ than in $-\mathbf{E}\times \mathbf{B}$ direction, thus confirming the notion that ionisation zones (also known as spokes or plasma bunches) are associated with moving potential humps. The motion of the recorded negatively charged high-energy oxygen ions was unaffected. NbO $_x$ thin films at different angles and positions were synthesised and analysed as to their structure and properties in order to correlate the observed plasma properties to the film growth conditions. The chemical composition and the film thickness varied with changing deposition angle, where the latter, similar to the ion fluxes, was higher in $+\mathbf{E}\times \mathbf{B}$ than in $-\mathbf{E}\times \mathbf{B}$ direction.

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Robert Franz

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3 publications

Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO $_x$ film growth

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Robert Franz

Research overview

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3 publications

Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbOx_xx​ film growth

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Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO $_x$ film growth