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Julian Schulze

Julian Schulze appears in the imported research catalog. Authorship, coauthor and topic links are available while profile ownership is still unclaimed.

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physics.plasm-ph

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Published work

6 published item(s)

preprint2026arXiv

Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas

Based on two-dimensional particle-in-cell simulations a novel approach towards Electron Energy Probability Function (EEPF) and plasma chemistry control by Current Waveform Tailoring (CWT) in the coil of inductively coupled discharges is proposed. Varying the shape of this current waveform provides electrical control of the dynamics of the electric field in the plasma. Using sawtooth instead of sinusoidal waveforms allows breaking and controlling the temporal symmetry of the electric field dynamics. In this way CWT allows controlling the EEPF, the ionization-to-excitation rate ratio, and the plasma chemistry.

0 citations0 reviewsNo code linkedOpen access
preprint2019arXiv

Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

A thorough understanding of the energy transfer mechanism from the electric field to electrons is of utmost importance for optimization and control of different plasma sources and processes. This mechanism, called electron power absorption, involves complex electron dynamics in electronegative capacitively coupled plasmas (CCPs) at low pressures, that are still not fully understood. Therefore, we present a spatio-temporally resolved analysis of electron power absorption in low pressure oxygen CCPs based on the momentum balance equation derived from the Boltzmann equation. Data are obtained from 1d3v Particle-In-Cell / Monte Carlo Collision simulations. In contrast to conventional theoretical models, which predict 'stochastic/collisionless heating' to be important at low pressure, we observe the dominance of Ohmic power absorption. In addition, there is an attenuation of ambipolar power absorption at low pressures due to the strong electronegativity, and the presence of electropositive edge regions in the discharge, which cause a high degree of temporal symmetry of the electron temperature within the RF period.

0 citations0 reviewsNo code linkedOpen access
preprint2016arXiv

Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas

Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio-frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.

0 citations0 reviewsNo code linkedOpen access
preprint2016arXiv

On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges

The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance leads to high frequency oscillations of the charge in the sheaths and enhances electron heating. Up to now, the phenomenon has only been observed in asymmetric discharges. There, the nonlinearity in the voltage balance, which is necessary for the self-excitation of resonance oscillations with frequencies above the applied frequencies, is caused predominantly by the quadratic contribution to the charge-voltage relation of the plasma sheaths. Using PIC/MCC simulations of single- and multi- frequency capacitive discharges and an equivalent circuit model, we demonstrate that other mechanisms such as a cubic contribution to the charge-voltage relation of the plasma sheaths and the time dependent bulk electron plasma frequency can cause the self-excitation of PSR oscillations, as well. These mechanisms have been neglected in previous models, but are important for the theoretical description of the current in symmetric or weakly asymmetric discharges.

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preprint2013arXiv

The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas

In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently the Secondary Electron Asymmetry Effect (SEAE) was discovered (T. Lafleur, P. Chabert and J.P. Booth, J. Phys. D: Appl. Phys. 46 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e. a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find, that the superposition of the EAE and the SEAE is non-linear, i.e. the asymmetries generated by each individual effect do not simply add up. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.

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preprint2013arXiv

Transport control of dust particles via the Electrical Asymmetry Effect: experiment, simulation, and modeling

The control of the spatial distribution of micrometer-sized dust particles in capacitively coupled radio frequency discharges is relevant for research and applications. Typically, dust particles in plasmas form a layer located at the sheath edge adjacent to the bottom electrode. Here, a method of manipulating this distribution by the application of a specific excitation waveform, i.e. two consecutive harmonics, is discussed. Tuning the phase angle θbetween the two harmonics allows to adjust the discharge symmetry via the Electrical Asymmetry Effect (EAE). An adiabatic (continuous) phase shift leaves the dust particles at an equilibrium position close to the lower sheath edge. Their levitation can be correlated with the electric field profile. By applying an abrupt phase shift the dust particles are transported between both sheaths through the plasma bulk and partially reside at an equilibium position close to the upper sheath edge. Hence, the potential profile in the bulk region is probed by the dust particles providing indirect information on plasma properties. The respective motion is understood by an analytical model, showing both the limitations and possible ways of optimizing this sheath-to-sheath transport. A classification of the transport depending on the change in the dc self bias is provided, and the pressure dependence is discussed.

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