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Jan E. Mehner

Jan E. Mehner appears in the imported research catalog. Authorship, coauthor and topic links are available while profile ownership is still unclaimed.

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physics.app-ph

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Published work

3 published item(s)

preprint2020arXiv

Nonlinear Dynamical System Model for Drive Mode Amplitude Instabilities in MEMS Gyroscopes

The requirements pertaining to the reliability and accuracy of micro-electromechanical gyroscopic sensors are increasing,as systems for vehicle localization emerge as an enabling factor for autonomous driving. Since micro-electromechanical systems (MEMS) became a mature technology, the modelling techniques used for predicting their behaviour expanded from mostly linear approaches to include nonlinear dynamic effects. This leads to an increased understanding of the various nonlinear phenomena that limit the performance of MEMS sensors. In this work, we develop a model of two nonlinearly coupled mechanical modes and employ it to explain measured drive mode instabilities in MEMS gyroscopes. Due to 3:1 internal resonance between the drive mode and a parasitic mode, energy transfer within the conservative system occurs. From measurements of amplitude response curves showing hysteresis effects, we extract all nonlinear system parameters and conclude that the steady-state model needs to be expanded by a transient simulation in order to fully explain the measured system behaviour.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Parametric Amplification of Broadband Vibrational Energy Harvesters for Energy-Autonomous Sensors Enabled by Field-Induced Striction

We investigate the influence of parametric excitation on MEMS vibration energy harvesters for energy autonomous sensor systems. In Industry 4.0 (or Industrial IoT) applications, interconnected sensors provide a means of data acquisition for automated control of the manufacturing process. Ensuring a continuous energy supply to the sensors is essential for their reliable operation. Manufacturing machines usually display a wide spectrum of vibration frequencies which needs to be covered by an array of harvester substructures in order to maintain the desired output level. We show that mechanical structures designed to implement a Helmholtz-Duffing oscillator have an increased bandwidth by exploiting several orders of parametric resonances. In contrast to concepts implementing parametric amplification in a multi-mode scenario, our concept is based on a single mechanical mode. Therefore, it is more robust against fabrication tolerances as the relevant multi-mode resonance conditions do not need to be matched on the level of single chips. Using exact transient simulations and semi-analytic models to showcase the relation of the Helmholtz-Duffing oscillator to the damped and driven Mathieu equation, we show that parametric resonances highly increase the bandwidth of the output power whenever high Helmholtz nonlinearities are present. To achieve the required nonlinearities, we suggest nonlinear stress-strain curves and we propose to achieve such nonlinearities through field-induced striction by magneto- or electrostriction. Thus, we are able to propose a novel energy harvester concept incorporating strictive materials that exploits the effects of parametric excitation to achieve broadband vibrational energy harvesting.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Validating the Critical Point of Spontaneous Parametric Down-Conversion for over 600 Scanning MEMS Micro Mirrors on Wafer-Level

Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS are increasing. Devices outside of the performance specifications have to be rejected which is costly due to the high processing times of MEMS technologies. In particular, nonlinear system behavior is often found to cause unexpected device failure or performance issues. Thus, accurate simulation or rather system models which account for nonlinear sensor dynamics can not only increase process yield, but more importantly, lead to a comprehensive understanding of the underlying physics and to improved MEMS design. We have studied [1] the possibility of a rather drastic device failure induced by nonlinearities on the example of a resonant scanning MEMS micro mirror. On the level of a few selected chips, we have carefully measured the complex nonlinear system behavior and modeled it by a nonlinear mode-coupling phenomenon known as spontaneous parametric down-conversion (SPDC). The most intriguing feature of SPDC is the sudden change from a rather linear to a nonlinear system behavior at the critical oscillation amplitude. However, the threshold only lies within the range of the mirror's operational amplitude, if certain frequency resonance conditions regarding the mechanical modes are met. Thus, the critical amplitude strongly depends on the frequency spectrum of the MEMS design which in turn is largely influenced by fabrication imperfections. We validate the dependence of the critical amplitude on the resonance condition by measuring it for over 600 micro mirrors on wafer-level. Our work does not only validate the theory of SPDC with measurements on such a large scale, but also demonstrates modeling strategies which are essential for MEMS product design.

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