Researcher profile

J. T. M. van Beek

J. T. M. van Beek contributes to research discovery and scholarly infrastructure.

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cond-mat.mes-hall cond-mat.mtrl-sci cond-mat.stat-mech

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preprint2013arXiv

Parameter Extraction and Support-Loss in MEMS Resonators

In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time.

preprint2011arXiv

Piezoresistive heat engine and refrigerator

Heat engines provide most of our mechanical power and are essential for transportation on macroscopic scale. However, although significant progress has been made in the miniaturization of electrostatic engines, it has proven difficult to reduce the size of liquid or gas driven heat engines below 10^7 um^3. Here we demonstrate that a crystalline silicon structure operates as a cyclic piezoresistive heat engine when it is driven by a sufficiently high DC current. A 0.34 um^3 engine beam draws heat from the DC current using the piezoresistive effect and converts it into mechanical work by expansion and contraction at different temperatures. This mechanical power drives a silicon resonator of 1.1x10^3 um^3 into sustained oscillation. Even below the oscillation threshold the engine beam continues to amplify the resonator's Brownian motion. When its thermodynamic cycle is inverted, the structure is shown to reduce these thermal fluctuations, therefore operating as a refrigerator.