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G. Pandraud

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quant-ph cond-mat.mes-hall

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preprint2016arXiv

Control of Recoil Losses in Nanomechanical SiN Membrane Resonators

In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a "loss shield" for a circular membrane. In this device the vibrations of the membrane, with a quality factor of $10^7$ , reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.

preprint2015arXiv

Dynamical two-mode squeezing of thermal fluctuations in a cavity opto-mechanical system

We report the experimental observation of two-mode squeezing in the oscillation quadratures of a thermal micro-oscillator. This effect is obtained by parametric modulation of the optical spring in a cavity opto-mechanical system. In addition to stationary variance measurements, we describe the dynamic behavior in the regime of pulsed parametric excitation, showing enhanced squeezing effect surpassing the stationary 3dB limit. While the present experiment is in the classical regime, our technique can be exploited to produce entangled, macroscopic quantum opto-mechanical modes.

preprint2015arXiv

Microfabrication of large area high-stress silicon nitride membranes for optomechanical devices

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN $_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress SiN $_x$ membranes were fabricated and used as optomechanical resonators in a Michelson interferometer and in a Fabry-Pérot cavity. The measurements show that the fabrication process preserves both the optical quality and the mechanical quality factor of the membrane.

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