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Researcher profile

Drew M. Miles

Drew M. Miles contributes to research discovery and scholarly infrastructure.

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astro-ph.IM

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2 published item(s)

preprint2022arXiv

High Efficiency Echelle Gratings for the Far Ultraviolet

Modern grating manufacturing techniques suffer from inherent issues that limit their peak efficiencies. The anisotropic etching of silicon facilitates the creation of custom gratings that have sharp and atomically smooth facets, directly addressing these issues. We describe work to fabricate and characterize etched silicon echelles optimized for the far ultraviolet (FUV; 90 - 180 nm) bandpass. We fabricate two echelles that have similar parameters to the mechanically ruled grating flown on the CHESS sounding rocket. We demonstrate a 42% increase in peak order efficiency and an 83% decrease in interorder scatter using these gratings. We also present analysis on where the remaining efficiency resides. These demonstrated FUV echelle improvements benefit the faint source sensitivity and high-resolution performance of future UV observatories.

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preprint2020arXiv

Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration

Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or feature a slight curvature. While fabrication procedures centering on wet anisotropic etching in monocrystalline silicon produce highly efficient blazed gratings, the precision of a nonparallel groove layout is limited by the cubic structure of the silicon crystal. This motivates the pursuit of alternative techniques to grating manufacture, namely thermally activated selective topography equilibration (TASTE), which uses gray-scale electron-beam lithography to pattern multilevel structures in resist followed by an optimized polymer thermal reflow to smooth the 3D patterns into continuous surface relief profiles. Using TASTE, a mold for a reflection grating with a periodicity of 400 nm and grooves resembling an asymmetric sawtooth was patterned in 130 nm thick poly(methyl methacrylate) resist on a silicon substrate over a 50 mm by 7.5 mm area. This structure was coated with 15 nm of gold by electron-beam physical vapor deposition using titanium as an adhesion layer and then tested for EUV and SXR diffraction efficiency at beamline 6.3.2 of the Advanced Light Source synchrotron facility. Results demonstrate a quasi-blaze response characteristic of a 27 degree blaze angle with groove facets smooth to 1.5 nm rms. Absolute peak-order efficiency ranges from 75% to 25%, while total relative efficiency measures gap90% across the measured bandpass of 15.5 nm > lambda > 1.55 nm.

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