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D. Eremin

D. Eremin appears in the imported research catalog. Authorship, coauthor and topic links are available while profile ownership is still unclaimed.

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physics.plasm-phphysics.comp-ph

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Published work

5 published item(s)

preprint2015arXiv

Electromagnetic Effects in Capacitively Coupled Plasmas

Following requirements of the plasma processing industry for increasing throughput, capacitively coupled plasma reactors with large area electrodes driving by very high frequency sources have been proposed. However, such reactors with plasmas inside support modes which can negatively influence the uniformity in the ion fluxes or the average energy of the ions impinging on the substrates, which is an essential requirement of the industry. It is shown when the popular electrostatic approximation used for description of the fields in capacitively coupled plasmas (CCP) breaks down and when these modes must be treated electromagnetically. Influence of the modes on the essential parameters of the CCP discharges is discussed. A few techniques for avoiding excitation of the modes leading to the undesired nonuniformities are mentioned. Results of several experiments studying such plasma discharges are briefly reviewed.

0 citations0 reviewsNo code linkedOpen access
preprint2013arXiv

An algebraic RF sheath model for all excitation waveforms and amplitudes, and all levels of collisionality

The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough understanding of the sheath dynamics is therefore of theoretical and practical importance. This work focusses on the so-called "algebraic" approach which strives to describe the electrical behavior of RF modulated boundary sheaths in closed analytical form, i.e., without the need to solve differential equations. A mathematically simple, analytical expression for the charge-voltage relation of a sheath is presented which holds for all excitation wave forms and amplitudes and covers all regimes from the collision-less motion at low gas pressure to the collision dominated motion at gas high pressure. A comparison with the results of self-consistent particle-in-cell simulations is also presented.

0 citations0 reviewsNo code linkedOpen access
preprint2013arXiv

Ionization by bulk heating of electrons in capacitive radio frequency atmospheric pressure microplasmas

Electron heating and ionization dynamics in capacitively coupled radio frequency (RF) atmospheric pressure microplasmas operated in helium are investigated by Particle in Cell simulations and semi-analytical modeling. A strong heating of electrons and ionization in the plasma bulk due to high bulk electric fields are observed at distinct times within the RF period. Based on the model the electric field is identified to be a drift field caused by a low electrical conductivity due to the high electron-neutral collision frequency at atmospheric pressure. Thus, the ionization is mainly caused by ohmic heating in this "Omega-mode". The phase of strongest bulk electric field and ionization is affected by the driving voltage amplitude. At high amplitudes, the plasma density is high, so that the sheath impedance is comparable to the bulk resistance. Thus, voltage and current are about 45° out of phase and maximum ionization is observed during sheath expansion with local maxima at the sheath edges. At low driving voltages, the plasma density is low and the discharge becomes more resistive resulting in a smaller phase shift of about 4°. Thus, maximum ionization occurs later within the RF period with a maximum in the discharge center. Significant analogies to electronegative low pressure macroscopic discharges operated in the Drift-Ambipolar mode are found, where similar mechanisms induced by a high electronegativity instead of a high collision frequency have been identified.

0 citations0 reviewsNo code linkedOpen access
preprint2013arXiv

Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime

The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the entire discharge, a planar radio frequency capacitively coupled plasma (RF-CCP) with an additional heating source. The second code is based on the recently published scheme Ensemble-in-Spacetime (EST); it resolves only the sheath and requires the time resolved voltage across and the ion flux into the sheath as input. Ion inertia causes a temporal asymmetry (hysteresis) of the sheath charge-voltage relation; also other ion transit time effects are found. The two codes are in good agreement, both with respect to the spatial and temporal dynamics of the sheath and with respect to the ion energy distributions at the electrodes. It is concluded that the EST scheme may serve as an efficient post-processor for fluid or global simulations and for measurements: It can rapidly and accurately calculate ion distribution functions even when no genuine kinetic information is available.

0 citations0 reviewsNo code linkedOpen access
preprint2012arXiv

Simulation benchmarks for low-pressure plasmas: capacitive discharges

Benchmarking is generally accepted as an important element in demonstrating the correctness of computer simulations. In the modern sense, a benchmark is a computer simulation result that has evidence of correctness, is accompanied by estimates of relevant errors, and which can thus be used as a basis for judging the accuracy and efficiency of other codes. In this paper, we present four benchmark cases related to capacitively coupled discharges. These benchmarks prescribe all relevant physical and numerical parameters. We have simulated the benchmark conditions using five independently developed particle-in-cell codes. We show that the results of these simulations are statistically indistinguishable, within bounds of uncertainty that we define. We therefore claim that the results of these simulations represent strong benchmarks, that can be used as a basis for evaluating the accuracy of other codes. These other codes could include other approaches than particle-in-cell simulations, where benchmarking could examine not just implementation accuracy and efficiency, but also the fidelity of different physical models, such as moment or hybrid models. We discuss an example of this kind in an appendix. Of course, the methodology that we have developed can also be readily extended to a suite of benchmarks with coverage of a wider range of physical and chemical phenomena.

0 citations0 reviewsNo code linkedOpen access