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D. A. Grishina

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cond-mat.mtrl-sci physics.app-ph

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preprint2018arXiv

X-ray imaging non-destructively identifies functional 3D photonic nanostructures

To investigate the performance of three-dimensional (3D) nanostructures, it is vital to study in situ their internal structure non-destructively. Hence, we perform synchrotron X-ray holographic tomography on exemplary 3D silicon photonic band gap crystals without irreversible preparation steps. Here, we obtain real space 3D density distributions of whole crystals buried on 2 mm^2 beams with 20 nanometer resolution. Our X-ray results identify why structures that look similar in scanning electron microscopy have vastly different nanophotonic functionality: One crystal with a broad photonic gap reveals 3D periodicity as designed ("Good"), a second structure without gap reveals a buried void ("Bad"), a third one without gap is shallow due to fabrication errors ("Ugly"). We conclude that X-ray tomography is a crucial tool to critically assess 3D functional nanostructures.

preprint2015arXiv

Method to make a single-step etch mask for 3D monolithic nanostructures

Current nanostructure fabrication by etching is usually limited to planar structures as they are defined by a planar mask. The realisation of three-dimensional (3D) nanostructures by etching requires technologies beyond planar masks. We present a method to fabricate a 3D mask that allows to etch three-dimensional monolithic nanostructures by using only CMOS-compatible processes. The mask is written in a hard-mask layer that is deposited on two adjacent inclined surfaces of a Si wafer. By projecting in single step two different 2D patterns within one 3D mask on the two inclined surfaces, the mutual alignment between the patterns is ensured. Thereby after the mask pattern is defined, the etching of deep pores in two oblique directions yields a three-dimensional structure in Si. As a proof of concept we demonstrate 3D mask fabrication for three-dimensional diamond-like photonic band gap crystals in silicon. The fabricated crystals reveal a broad stop gap in optical reflectivity measurements. We propose how 3D nanostructures with five different Bravais lattices can be realised, namely cubic, tetragonal, orthorhombic, monoclinic, and hexagonal, and demonstrate a mask for a 3D hexagonal crystal. We also demonstrate the mask for a diamond-structure crystal with a 3D array of cavities. In general, the 2D patterns for the different surfaces can be completely independent and still be in perfect mutual alignment. Indeed, we observe an alignment accuracy of better than 3.0 nm between the 2D mask patterns on the inclined surfaces, which permits one to etch well-defined monolithic 3D nanostructures.