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An-Bang Sun

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physics.plasm-ph

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preprint2022arXiv

On the Ohmic-dominant heating mode of capacitively-coupled plasma inverted by boundary electron emission

Electron emission from the boundary is ubiquitous in capacitively coupled plasma (CCP) and precipitates nonnegligible influences on the discharge properties. Here we present the PIC-MCC simulation of an Ohmic-dominant heating mode of capacitively coupled plasma where the stochastic heating vanishes and only Ohmic heating sustains the discharge, due to sheath inversion by boundary electron emission. The inverted CCP features negative sheath potential without Bohm presheath, hence excluding plasma heating due to sheath edge oscillation. The particle and energy transport of the proposed heating mode is analyzed. The influences of boundary electron emission flux, source voltage, and neutral pressure on the transition between classic and Ohmic-dominant CCP heating modes are shown with designated simulation scans. A modified inverse sheath-plasma coupling due to excessive ionization is discovered. In the end, key indicators of the proposed heating mode in plasma diagnostics are provided for future experimental verifications.

preprint2021arXiv

On the electron sheath theory and its applications in plasma-surface interaction

The electron sheath is a particular electron-rich sheath with negative net charges where plasma potential is lower than the biased electrode. Here an improved understanding of electron sheath theory is provided using both fluid and kinetic approaches while elaborating on its implications for plasma-surface interaction. A fluid model is first proposed considering the electron presheath structure, avoiding the singularity in electron sheath Child-Langmuir law. The latter is proved to underestimate the sheath potential. Subsequently, the kinetic model of electron sheath is established, showing considerably different sheath profiles in respect to the fluid model due to the electron velocity distribution function and finite ion temperature. The model is then further generalized involving a more realistic truncated ion velocity distribution function. It is demonstrated that such distribution function yields a super-thermal electron sheath whose entering velocity at sheath edge is greater than that prescribed by the Bohm criterion, implying a potentially omitted calibration issue in the probe measurement. Furthermore, an attempt is made to incorporate the self-consistent presheath-sheath match within the kinetic framework, showing a necessary compromise between realistic sheath entrance and the inclusion of kinetic effects. In the end, the consequent secondary electron emission due to sheath-accelerated plasma electrons in electron sheath are analyzed, providing a sheath potential coupled with the plasma and wall properties.

preprint2021arXiv

Unveiling the role of dielectric trap states on capacitively coupled radio-frequency plasma discharge: dynamic charging behaviors

The influence of charge trap states in the dielectric boundary material on capacitively coupled radio frequency plasma discharge is investigated with theory and Particle in cell/Monte Carlo Collision simulation. It is found that the trap states of the wall material manipulated discharge properties mainly through the varying ion induced secondary electron emission (SEE) coefficient in response to dynamic surface charges accumulated within solid boundary. A comprehensive SEE model considering surface charging is established first, which incorporates the valence band electron distribution, electron trap density, and charge trapping through Auger neutralization and de-excitation. Theoretical analysis is carried out to reveal the effects of trap states on sheath solution, stability, plasma density and temperature, particle and power balance, etc. The theoretical work is supported by simulation results, showing the reduction of the mean radio frequency sheath potential as charging-dependent emission coefficient increases. As the gas pressure increases, a shift of the maximum ionization rate from the bulk plasma center to the plasma-sheath interface is observed, which is also influenced by the trap states of the electrode material where the shift happens at a lower pressure with traps considered. In addition, charge traps are proved helpful for creating asymmetric plasma discharges with geometrically symmetric structures, such effect is more pronounced in γ mode discharges.

preprint2020arXiv

Intense boundary emission destroys normal radio-frequency plasma sheath

Plasma sheath is the non-neutral space charge region that isolates bulk plasma from boundary. Radio-frequency (RF) sheathes are formed when applying RF voltage to electrodes. Generally, applied bias is mainly consumed by RF sheath which shields external field. Here we report first evidence that intense boundary emission destroys normal RF sheath and establishes a novel type of RF plasma where external bias is consumed by bulk plasma instead of sheath. Ions are naturally confined while plasma electrons are unobstructed, generating strong RF current in entire plasma, combined with unique particle and energy balance. Proposed model offers possibility for ion erosion mitigation of plasma-facing component. It also inspires technics for reaction rate control in plasma processing and wave mode conversion.